Title:
TARGET PHOTOGRAPHING APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/123035
Kind Code:
A1
Abstract:
A target photographing apparatus according to one aspect of the present invention is provided with: a delay circuit that receives a timing signal from the outside, and outputs a first trigger signal at a timing delayed from the time of receiving the timing signal by a first delay time; an illumination light source that emits light on the basis of the first trigger signal; a photographing unit that is arranged so as to photograph an image of the shadow of a target through irradiation of the target to be observed with the light emitted from the illumination light source; a processing unit that carries out image processing including a process for measuring background luminance from the image photographed by the photographing unit; and a control unit that executes control for adjusting the first delay time on the basis of the background luminance.
Inventors:
HOSODA HIROKAZU (JP)
Application Number:
PCT/JP2016/089153
Publication Date:
July 05, 2018
Filing Date:
December 28, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20
Domestic Patent References:
| WO2015041260A1 | 2015-03-26 | |||
| WO2014147901A1 | 2014-09-25 |
Foreign References:
| JP2009104924A | 2009-05-14 | |||
| JP2014086523A | 2014-05-12 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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