Title:
TARGET SUPPLY APPARATUS AND EUV LIGHT GENERATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/040674
Kind Code:
A1
Abstract:
This target supply apparatus is provided with: a tank, which has a cylindrically formed main body section, one end section that closes one end of the main body section, said one end being in the axis direction of the main body section, and the other end section that closes the other end in the axis direction; a nozzle, which is provided at the one end section of the tank, and which outputs a target substance stored in the tank; and an inert gas supply section that supplies an inert gas to the inside of the tank. The inert gas supply section may be provided with a gas flow channel, which penetrates the other end section of the tank, and which guides the inert gas in the direction toward an inner wall surface of the main body section.
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Inventors:
NISHISAKA TOSHIHIRO (JP)
KATO YOSHIAKI (JP)
IWAMOTO FUMIO (JP)
KATO YOSHIAKI (JP)
IWAMOTO FUMIO (JP)
Application Number:
PCT/JP2013/075036
Publication Date:
March 26, 2015
Filing Date:
September 17, 2013
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Foreign References:
| JP2013179029A | 2013-09-09 | |||
| JP2005268461A | 2005-09-29 | |||
| JP2012138364A | 2012-07-19 | |||
| JP2013073733A | 2013-04-22 |
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
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