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Title:
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/130443
Kind Code:
A1
Abstract:
This target supply device is provided with a nozzle which outputs a liquid target substance housed in a tank, a vibrating element which is driven by input of a square wave electric signal, a droplet detection unit which detects droplets outputted from the nozzle, a transit time interval measuring unit which measures the transit time interval of droplets, and a control unit, wherein the control unit may be configured so as to perform: processing for configuring a suitable range for the transit time interval; processing for changing the duty value of the electric signal inputted to the vibrating element and storing, associated with the duty values, the transit time interval measured values of the droplets generated at each of the multiple duty values, as well as the variation of said transit time interval measured values; and processing for determining, from those of the duty values at which the transit time interval measured value is within the suitable range, an operation duty value on the basis of the variation.

Inventors:
FUJIMAKI TAKAHISA (JP)
YABU TAKAYUKI (JP)
TAKASHIMA YUTA (JP)
IWAMOTO FUMIO (JP)
SHIRAISHI YUTAKA (JP)
Application Number:
PCT/JP2016/072974
Publication Date:
August 03, 2017
Filing Date:
August 04, 2016
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Domestic Patent References:
WO2014189055A12014-11-27
WO2011013779A12011-02-03
Foreign References:
JP2014186846A2014-10-02
JP2010527300A2010-08-12
JP2009541093A2009-11-26
JP2012191171A2012-10-04
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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