TARGET SUPPLY DEVICE - GIGAPHOTON INC

Title:

TARGET SUPPLY DEVICE

Document Type and Number:

WIPO Patent Application WO/2015/087454

Kind Code:

A1

Abstract:

This target supply device has: a target generator that contains a liquid target substance and has a nozzle in which nozzle holes via which the liquid target substance is outputted are formed; and a filter that is provided inside the target generator and is made from a glass that reacts with the liquid target substance to generate a solid reaction product. The filter has first through-holes for circulating the liquid target substance, and the inside surfaces of said first through-holes are coated with a material that exhibits low reactivity with respect to the liquid target substance.

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Inventors:

SHIRAISHI YUTAKA (JP)
HIRASHITA TOSHIYUKI (JP)

Application Number:

PCT/JP2013/083514

Publication Date:

June 18, 2015

Filing Date:

December 13, 2013

Export Citation:

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Assignee:

GIGAPHOTON INC (JP)

International Classes:

H05G2/00; H01L21/027

Foreign References:

JP2011514648A	2011-05-06
JP2013514966A	2013-05-02
JP2013140771A	2013-07-18

Attorney, Agent or Firm:

KINOSHITA & ASSOCIATES (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)

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