Title:
TARGET-SUPPLYING DEVICE AND EUV-LIGHT-GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/166868
Kind Code:
A1
Abstract:
This target-supplying device (7A) is provided with a tank (711A) that stores a target substance (270), a nozzle (718A) that is connected to said tank (711A) and outputs the target substance (270), and a gas-supplying unit (73A) that supplies a gas to the tank (711A). The gas-supplying unit (73A) may be provided with the following: a pressure booster (731A) that is connected to a gas line (730A), boosts the pressure of a gas supplied from said gas line (730A), and outputs said gas to the tank (711A); a pressure sensor (735A) that measures the pressure inside the tank (711A); and a pressure controller (736A) that, on the basis of measurement results from the pressure sensor (735A), adjusts the pressure of the gas supplied to the tank (711A).
Inventors:
SHIRAISHI YUTAKA (JP)
SHISHIBA HIDEKI (JP)
SHISHIBA HIDEKI (JP)
Application Number:
PCT/JP2015/062304
Publication Date:
November 05, 2015
Filing Date:
April 22, 2015
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Domestic Patent References:
| WO2014024865A1 | 2014-02-13 |
Foreign References:
| JP2013175434A | 2013-09-05 | |||
| JPH0364479A | 1991-03-19 | |||
| JPH09271652A | 1997-10-21 |
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
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