Title:
TASK SCHEDULING METHOD AND SEMICONDUCTOR PROCESS DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/124684
Kind Code:
A1
Abstract:
Embodiments of the present invention provide a task scheduling method. The method comprises: obtaining task data of all tasks to be started, the task data comprising process numbers, processing durations, processing positions and processing position stagnation durations corresponding to all processes corresponding to the tasks to be started; inputting task data of each task to be started into a task scheduling model to obtain a start time of each task to be started outputted by the task scheduling model, the task scheduling model taking the shortest total duration required for executing all the tasks to be started as a target function, and constraint conditions of the task scheduling model being associated with the task data; and performing task scheduling on the tasks to be started according to the start time of each task to be started. According to the embodiments of the present invention, the completion efficiency of the tasks can be improved, and then the device productivity is improved.
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Inventors:
YANG GUANG (CN)
Application Number:
PCT/CN2022/134416
Publication Date:
July 06, 2023
Filing Date:
November 25, 2022
Export Citation:
Assignee:
XIAN NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
G06Q10/06; G06Q50/04; H01L21/67
Foreign References:
| CN114462781A | 2022-05-10 | |||
| CN112987674A | 2021-06-18 | |||
| CN111680877A | 2020-09-18 | |||
| CN112884321A | 2021-06-01 | |||
| US20170337492A1 | 2017-11-23 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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