Title:
TEMPERATURE ADJUSTMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/224690
Kind Code:
A1
Abstract:
[Problem] To provide a temperature adjustment device that, for adjusting the temperature of a load to a target temperature, can gradually change the temperature of the load to the target temperature while adjusting the temperature even in the middle of the adjustment. [Solution] At each of a plurality of predetermined timings (elapsed times) within a target reach time td, a temperature-set-at-elapsed-time Tn of a load W is calculated from a target temperature gradient Sa (S3), and also the temperature-set-at-elapsed-time Tn is compared with a temperature-measured-at-elapsed-time Tm input from a measurement input unit 50 (S5). A control output unit (53) controls a heating unit 3 and a cooling unit 4, on the basis of the result of the comparison between the temperature-set-at-elapsed-time Tn and the temperature-measured-at-elapsed-time Tm.
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Inventors:
ADACHI MAKOTO (JP)
Application Number:
PCT/JP2022/013820
Publication Date:
October 27, 2022
Filing Date:
March 24, 2022
Export Citation:
Assignee:
SMC CORP (JP)
International Classes:
G05D23/00; F25B1/00; G05D23/19
Foreign References:
| JPH11294927A | 1999-10-29 | |||
| JP2816054B2 | 1998-10-27 | |||
| JP2691001B2 | 1997-12-17 | |||
| JP2019191841A | 2019-10-31 | |||
| JP2008292026A | 2008-12-04 | |||
| JP2007101006A | 2007-04-19 |
Attorney, Agent or Firm:
HAYASHI Naoki et al. (JP)
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