Title:
TEMPERATURE ADJUSTMENT MECHANISM, AND PLASMA TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/032745
Kind Code:
A1
Abstract:
Provided is a temperature adjustment mechanism capable of controlling the temperature of a dielectric window (8a) to be used for a plasma treatment to realize an excellent plasma treatment and controlling the temperature of the entirety of a plasma treatment apparatus (1) efficiently to ensure the safety of operations. Also provided is the plasma treatment apparatus (1) equipped with the temperature adjustment mechanism. The temperature adjustment mechanism of the plasma treatment apparatus (1) comprises a treatment container (8) equipped with the dielectric window (8a) which is formed of a dielectric material and which can be internally reduced in pressure, and external devices (11 and 12) which are arranged outside of the treatment container (8) and at least a part of which is in contact with the treatment container (8) so that the heat of the treatment container (8) is conducted thereto. The plasma treatment apparatus (1) is equipped with external device cooling passages (23 and 24) for circulating a heating medium to the external devices (11 and 12), dielectric window cooling passages (21 and 22) arranged in a manner that at least a part thereof is thermally conductive with the dielectric window (8a) and circulating the heating medium to the vicinity of the dielectric window (8a), a cooling device (20) for adjusting the heating medium to a predetermined temperature, and a heating means (25) for heating the heating medium which is to flow into the dielectric window cooling passages (21 and 22) to a predetermined temperature in advance. The heating medium having flown out of the external device cooling passages (23 and 24) is adjusted, before flowing into the dielectric window cooling passages (21 and 22), to the predetermined temperature by the cooling device (20) and/or the heating means (25).
Inventors:
NISHIMOTO SHINYA (JP)
Application Number:
PCT/JP2009/066141
Publication Date:
March 25, 2010
Filing Date:
September 16, 2009
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
NISHIMOTO SHINYA (JP)
NISHIMOTO SHINYA (JP)
International Classes:
H05H1/46; C23C16/511; H01L21/205; H01L21/3065
Domestic Patent References:
| WO2002067301A1 | 2002-08-29 |
Foreign References:
| JP2007250796A | 2007-09-27 | |||
| JP2003303812A | 2003-10-24 |
Attorney, Agent or Firm:
KIMURA MITSURU (JP)
Mitsuru Kimura (JP)
Mitsuru Kimura (JP)
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