Title:
TEMPERATURE ADJUSTMENT METHOD FOR MOUNTING BASE, INSPECTION DEVICE, AND MOUNTING BASE
Document Type and Number:
WIPO Patent Application WO/2020/235356
Kind Code:
A1
Abstract:
A method for performing temperature control of a mounting base on which a substrate is to be mounted. A substrate mounting surface of the mounting base is divided in the radial direction into a plurality of regions, and a heater is provided to each of the plurality of regions. The method includes: a step for performing feedback control that adjusts the operation amount of the heater in the centermost region of the plurality of regions of the substrate mounting surface such that the centermost region is at a set temperature; and a step for performing feedback control that adjusts the operation amount of the heater in an outside region that is further to the outside than the centermost region of the plurality of regions of the substrate mounting surface such that the temperature difference between the outside region and the region that is adjacent to the outside region on the inside in the radial direction is a preset value.
Inventors:
KASAI SHIGERU (JP)
Application Number:
PCT/JP2020/018658
Publication Date:
November 26, 2020
Filing Date:
May 08, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H05B3/00; H01L21/683
Domestic Patent References:
| WO2018030433A1 | 2018-02-15 |
Foreign References:
| JP2003282461A | 2003-10-03 | |||
| JP2002231421A | 2002-08-16 | |||
| JP2017228230A | 2017-12-28 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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