Title:
TEMPERATURE CONTROL APPARATUS, CONTROL METHOD THEREFOR, AND PLASMA DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/227913
Kind Code:
A1
Abstract:
The present invention relates to a temperature control apparatus, a control method therefor, and a plasma device. The temperature control apparatus comprises a temperature control part and a control part; the control part is electrically connected to the temperature control part and is used for obtaining in real time the actual temperature of an upper electrode in a plasma device; the temperature control part comprises at least one semiconductor refrigeration device, and the semiconductor refrigeration device is located on the surface of the upper electrode; a plurality of semiconductor refrigeration pieces are arranged into a plurality of annular heating blocks, and each heating region is respectively controlled by means of the control part to perform refrigeration and heating; and when the temperature is abnormal, quick reaction is achieved, which helps to improve the temperature control effect.
Inventors:
LI SONGYU (CN)
Application Number:
PCT/CN2021/091842
Publication Date:
November 18, 2021
Filing Date:
May 06, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01J37/32
Foreign References:
| CN112750676A | 2021-05-04 | |||
| CN101389178A | 2009-03-18 | |||
| CN206076197U | 2017-04-05 | |||
| CN109461641A | 2019-03-12 | |||
| JP2004259829A | 2004-09-16 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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