Title:
TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2017/085781
Kind Code:
A1
Abstract:
In a temperature control device (1), when ramp control is performed, a temperature control unit (3) calculates a correction target value such that the influence of a steady-state velocity deviation is eliminated. Further, in accordance with the calculated correction target value, the temperature control unit (3) performs normal PID operation configured by a single integrator, whereby it is possible to calculate a manipulated variable for correction such that the influence of the steady-state velocity deviation is eliminated. The temperature control device (1) is configured as described above, so it is possible to eliminate the influence of the steady-state velocity deviation through the PID operation by a single integrator that is generally used, and control the temperature of an object for temperature control so as to enhance target temperature tracking without increasing cost.
Inventors:
GOTOH SHIGEFUMI (JP)
KIHARA TAKESHI (JP)
KIHARA TAKESHI (JP)
Application Number:
PCT/JP2015/082222
Publication Date:
May 26, 2017
Filing Date:
November 17, 2015
Export Citation:
Assignee:
RKC INSTRUMENTS INC (JP)
International Classes:
G05B11/36; G05D23/19
Foreign References:
| JPH03269703A | 1991-12-02 | |||
| JPH0619503A | 1994-01-28 | |||
| JPH02165304A | 1990-06-26 |
Attorney, Agent or Firm:
KATO, Masanobu et al. (JP)
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