Title:
TEMPERATURE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/095795
Kind Code:
A1
Abstract:
A temperature control device comprising: a top plate supporting a substrate; a base plate connected to the top plate so as to form an internal space therebetween; a thermoelectric module plate arranged in the internal space; a heat exchange plate arranged in the internal space and exchanging heat with the thermoelectric module plate; a first joining member that joins the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to both the top plate and the base plate; and a second joining member that joins the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.
Inventors:
KOBAYASHI ATSUSHI (JP)
HORIKOSHI MASATO (JP)
OHKUBO HIDEAKI (JP)
KIYOSAWA WATARU (JP)
HORIKOSHI MASATO (JP)
OHKUBO HIDEAKI (JP)
KIYOSAWA WATARU (JP)
Application Number:
PCT/JP2019/042612
Publication Date:
May 14, 2020
Filing Date:
October 30, 2019
Export Citation:
Assignee:
KELK LTD (JP)
International Classes:
H01L35/30; H01L21/3065; H01L21/683; H01L35/32
Domestic Patent References:
| WO2018038044A1 | 2018-03-01 |
Foreign References:
| JP2015008287A | 2015-01-15 | |||
| JP2013055089A | 2013-03-21 | |||
| JP2002353298A | 2002-12-06 | |||
| JP2003508893A | 2003-03-04 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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