Title:
TEMPERATURE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/204203
Kind Code:
A1
Abstract:
Provided is a temperature control device with which the temperature of a temperature control fluid to be supplied to an object for temperature control can be controlled with high accuracy, compared to a case where no control means is provided that controls the temperature adjusting capacity of a supply means on the basis of a detection result from a detection means that detects the thermal load of the object for temperature control. The temperature control device is provided with: a supply means that supplies a temperature control fluid after adjusting the temperature of the temperature control fluid to a predetermined temperature; a detection means that is disposed on the side of an object for temperature control to which the temperature control fluid is supplied from the supply means, and that detects the thermal load of the object for temperature control; and a control means that controls the temperature adjusting capacity of the supply means on the basis of a detection result from the detection means.
Inventors:
TAKAYAMA MICHIO (JP)
SASAKI ISAMU (JP)
SASAKI ISAMU (JP)
Application Number:
PCT/JP2023/015437
Publication Date:
October 26, 2023
Filing Date:
April 18, 2023
Export Citation:
Assignee:
SHINWA CONTROLS CO LTD (JP)
International Classes:
H01L21/3065; C23C16/46; F25B1/00; H01L21/205; H01L21/683
Foreign References:
| JP2008292026A | 2008-12-04 | |||
| JP2021046987A | 2021-03-25 | |||
| JP2018138843A | 2018-09-06 | |||
| JP2018031453A | 2018-03-01 |
Attorney, Agent or Firm:
NAKAMURA Tomohiro et al. (JP)
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