Title:
TEMPERATURE CONTROL UNIT AND TEMPERATURE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2023/026552
Kind Code:
A1
Abstract:
A temperature control device according to the present invention is provided with: an acquisition unit acquiring first data which is target values, operating amounts, and time series data of measurement amounts using feedback control, and second data which is time series data of measurement amounts obtained by applying a prescribed operating amount to a control target; an estimation unit estimating a relationship between operating amounts and measurement values on the basis of the plurality of second data; and a generation unit generating feedforward information including time series data of feedforward amounts applied to the control target on the basis of the relationship between operating amounts and measurement values estimated by the estimation unit and the first data.
Inventors:
FURUKAWA HARUKI (JP)
MASAKI HIROYOSHI (JP)
OKITA TAKEHISA (JP)
YAMADA SHOTA (JP)
MASAKI HIROYOSHI (JP)
OKITA TAKEHISA (JP)
YAMADA SHOTA (JP)
Application Number:
PCT/JP2022/012774
Publication Date:
March 02, 2023
Filing Date:
March 18, 2022
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G05B11/36; G05B11/32; G05B13/02; G05D23/19
Domestic Patent References:
| WO2020137245A1 | 2020-07-02 |
Foreign References:
| JP2010266967A | 2010-11-25 | |||
| JP2019101847A | 2019-06-24 | |||
| JPH06202709A | 1994-07-22 | |||
| JPH06166078A | 1994-06-14 | |||
| JPH0876811A | 1996-03-22 | |||
| JP2008074007A | 2008-04-03 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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