Title:
TEMPERATURE CONTROLLER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, METHOD FOR CALCULATING PID CONSTANTS IN SEMICONDUCTOR MANUFACTURING, AND METHOD FOR OPERATING TEMPERATURE CONTROLLER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2014/017378
Kind Code:
A1
Abstract:
A temperature controller for semiconductor manufacturing equipment (3) is equipped with a temperature control means (72) for heating and cooling a fluid, which is used by semiconductor manufacturing equipment, on the inside in order to control the temperature of the fluid, and is equipped with a heat exchanger (7) that exchanges heat between fluid that has flowed in and the temperature control means (72). The temperature controller for semiconductor manufacturing equipment (3) is further equipped with: a proportional-integral-derivative (PID) constant calculation means (85) for calculating PID constants for PID control on the basis of the physical properties of the fluid, and a time constant of a temperature sensor (6) that measures the temperature of the fluid; and a PID control calculation means (86) that performs PID control of the temperature control means on the basis of the PID constants calculated by the PID constant calculation means (85).
Inventors:
MIMURA KAZUHIRO (JP)
Application Number:
PCT/JP2013/069512
Publication Date:
January 30, 2014
Filing Date:
July 18, 2013
Export Citation:
Assignee:
KELK LTD (JP)
International Classes:
G05B13/02; G05B11/36; G05D23/19; H01L21/304
Foreign References:
| JPS60151709A | 1985-08-09 | |||
| JPH11211191A | 1999-08-06 | |||
| JP2008066535A | 2008-03-21 | |||
| JP2009116515A | 2009-05-28 | |||
| JP2007027391A | 2007-02-01 |
Other References:
SHUICHI KUROGI ET AL.: "A Thermal Model of the RCA Cleaning System and AdaptivePredictive Temperature Control of Cleaning Solutions", TRANSACTIONS OF THE SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS, vol. 37, no. 8, 2001, pages 754 - 762
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
Bottom intellectual property office of patent business corporation Tatsuyuki (JP)
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