Title:
TEMPERATURE DETECTION TOOL
Document Type and Number:
WIPO Patent Application WO/2015/005093
Kind Code:
A1
Abstract:
A temperature detection tool is provided that is capable of reliably detecting the temperature of an object under measurement in a vacuum device without requiring the use of expensive vacuum-resistant components. A temperature detection tool (A) used to detect the temperature of an object under measurement inside a vacuum device is provided with a thermocouple unit (11) for acquiring temperature data for the object under measurement (work; 5), a logger unit (12) for accumulating the temperature data acquired by the thermocouple unit, a hermetic connecting wire (13) connecting the thermocouple unit and the logger unit, and a logger accommodation chamber (14) that accommodates the logger unit and is kept at atmospheric pressure. Additionally, a cover member (15) that is disposed so as to cover the logger accommodation chamber is provided. Further, a battery pack having batteries accommodated in a battery accommodation chamber is provided. In addition, a wireless communication unit pack having a wireless communication unit accommodated in a wireless communication unit accommodation chamber is provided.
Inventors:
ADACHI NAOYA (JP)
YAMANE SHIGEKI (JP)
YAMANE SHIGEKI (JP)
Application Number:
PCT/JP2014/066333
Publication Date:
January 15, 2015
Filing Date:
June 19, 2014
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01K1/02; G01K1/14; H01L21/66
Foreign References:
| JPH06160198A | 1994-06-07 | |||
| JP2010229498A | 2010-10-14 | |||
| JPH0442781U | 1992-04-10 | |||
| JP2012163525A | 2012-08-30 |
Attorney, Agent or Firm:
NISHIZAWA, HITOSHI (JP)
Hitoshi Nishizawa (JP)
Hitoshi Nishizawa (JP)
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