Title:
TEMPERATURE MEASUREMENT DEVICE OF POWER ELEMENT USING PIEZOELECTRIC ELEMENT, THERMAL STRESS REDUCTION DEVICE, AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/182396
Kind Code:
A1
Abstract:
A temperature measurement device of a power element using a piezoelectric element, according to one embodiment of the present invention, comprises: a substrate; at least one power element which is formed on one side of the substrate; and at least one piezoelectric element which is disposed on the substrate in a position spaced apart from the power element, and measures thermal stress produced on the substrate in order to detect the temperature according to heat generation of the power element.
Inventors:
YOON SANG WON (KR)
KIM MIN KI (KR)
KIM MIN KI (KR)
Application Number:
PCT/KR2016/005107
Publication Date:
November 17, 2016
Filing Date:
May 13, 2016
Export Citation:
Assignee:
INDUSTRY-UNIV COOP FOUND HANYANG UNIV (KR)
International Classes:
G01K5/56; H01L41/08
Foreign References:
| JP2009180645A | 2009-08-13 | |||
| KR20150008894A | 2015-01-23 | |||
| JP2011527059A | 2011-10-20 | |||
| JP2013503388A | 2013-01-31 | |||
| JP2010520522A | 2010-06-10 |
Attorney, Agent or Firm:
SHIM, Kyoung-Shik et al. (KR)
심경식 (KR)
심경식 (KR)
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