Title:
TEMPERATURE MEASUREMENT METHOD FOR ULTRAVIOLET TRANSMITTANCE MEMBER, TEMPERATURE MEASUREMENT DEVICE FOR ULTRAVIOLET TRANSMITTANCE MEMBER, AND LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/099132
Kind Code:
A1
Abstract:
Provided is a temperature measurement method, a temperature measurement device, and the like which are capable of measuring the temperature of an ultraviolet transmittance member by using a simple configuration. One embodiment exemplifying the present invention is a temperature measurement device for measuring the temperature of an ultraviolet transmittance member for transmitting ultraviolet rays. This temperature measurement device (2) is configured so as to be equipped with a spectroscopic measurement unit (20) for detecting the intensity distribution of an ultraviolet ray (UV1) transmitted through the ultraviolet transmittance member, and a calculation processing unit (25) for obtaining an absorption edge wavelength of the ultraviolet transmittance member from the intensity distribution of the ultraviolet ray detected by the spectroscopic measurement unit (20), and deriving the temperature of the ultraviolet transmittance member on the basis of the obtained absorption edge wavelength.
Inventors:
MIZUGUCHI MASAFUMI (JP)
Application Number:
PCT/JP2014/084538
Publication Date:
July 02, 2015
Filing Date:
December 26, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01K11/12; G01N21/33
Foreign References:
| JP2006058246A | 2006-03-02 | |||
| JP2013231988A | 2013-11-14 | |||
| JP2005275095A | 2005-10-06 | |||
| JP2009163965A | 2009-07-23 | |||
| JP2009532829A | 2009-09-10 | |||
| JP2012079584A | 2012-04-19 |
Other References:
See also references of EP 3088858A4
Attorney, Agent or Firm:
KAWAKITA, Kijuro et al. (JP)
Kijuro Kawakita (JP)
Kijuro Kawakita (JP)
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