Title:
TEMPERATURE MEASUREMENT SENSOR, TEMPERATURE MEASUREMENT SYSTEM, AND TEMPERATURE MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2020/013299
Kind Code:
A1
Abstract:
A temperature measurement sensor according to an exemplary embodiment comprises a substrate, and an optical fiber provided on an upper surface of the substrate and extending along the upper surface. The temperature measurement sensor further comprises a light introducing path that is a space connecting the space above the upper surface and the space below a lower surface of the substrate, and an optical coupling portion provided on the upper surface and disposed in the light introducing path. The optical coupling portion is optically connected to an end surface of the optical fiber. The optical fiber constitutes a first pattern shape and a second pattern shape. The first pattern shape includes the optical fiber more densely than the second pattern shape does. The light entering the optical coupling portion from the lower surface side through the light introducing path reaches the end surface through the optical coupling portion.
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Inventors:
WU TONG (JP)
MINAMI TOMOHIDE (JP)
MIYAGAWA MASAAKI (JP)
MINAMI TOMOHIDE (JP)
MIYAGAWA MASAAKI (JP)
Application Number:
PCT/JP2019/027599
Publication Date:
January 16, 2020
Filing Date:
July 11, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01K11/32
Domestic Patent References:
| WO2017183471A1 | 2017-10-26 |
Foreign References:
| JP2003302562A | 2003-10-24 | |||
| JPH07218355A | 1995-08-18 | |||
| US5322361A | 1994-06-21 | |||
| JP2018152542A | 2018-09-27 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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