Title:
TEMPERATURE MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/074434
Kind Code:
A1
Abstract:
Disclosed is a temperature measuring apparatus which is provided with: a substrate (2); a temperature sensor (3) disposed on one surface of the substrate (2); and a wire (8) disposed to electrically connect together a circuit, which detects a temperature using the temperature sensor (3), and the temperature sensor (3). In said surface of the substrate (2), a recessed section (7) having a heat capacity smaller than that of the material of the substrate (2) is formed on the periphery of the temperature sensor (3). The recessed section (7) is formed at a predetermined interval from the temperature sensor (3) such that the recessed section surrounds the temperature sensor (3) and has predetermined width and depth. Preferably, the low heat capacity zone is the recessed section (7), i.e., the groove having a recessed cross-section.
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Inventors:
ISHIDA Hisaki (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
石田 寿樹 (〒92 山梨県韮崎市穂坂町三ツ沢６５０ 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
HAYASHI Masato (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
石田 寿樹 (〒92 山梨県韮崎市穂坂町三ツ沢６５０ 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
HAYASHI Masato (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
Application Number:
JP2010/071841
Publication Date:
June 23, 2011
Filing Date:
December 06, 2010
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
ISHIDA Hisaki (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
石田 寿樹 (〒92 山梨県韮崎市穂坂町三ツ沢６５０ 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
ISHIDA Hisaki (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
石田 寿樹 (〒92 山梨県韮崎市穂坂町三ツ沢６５０ 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
International Classes:
G01K1/18; H01L21/66
Attorney, Agent or Firm:
KIMURA Mitsuru (2nd Floor, Kyohan Building 7, Kandanishiki-cho 2-chome, Chiyoda-k, Tokyo 54, 〒1010054, JP)
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