Title:
TEMPERATURE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/029595
Kind Code:
A1
Abstract:
A temperature measuring device (5) is provided with a sheathed thermocouple
(50). The sheathed thermocouple has a leading end section (50a) movable in an
advancing/retracing direction by following a susceptor (4), and a buffer section
(50b) extending to the outside of a chamber (1) to allow movement of the leading
end section (50a). The temperature measuring device is also provided with a
compression coil spring (53) for urging the leading end section (50a) in a direction
to press the leading end section to the susceptor (4). A hermetically sealing
member (51) storing the compression coil spring (53) and the buffer section (50b)
is adhered to the bottom wall (19) of the chamber (1) so that inside the hermetically
sealed member communicates with the inside of the chamber (1). The end portion
of the buffer section (50b) extends to the external of the hermetically sealed
member (51), and a connecting section (55) is formed by being welded to a part where
the end portion of the buffer section (50b) of the hermetically sealed member
(51) extends.
Inventors:
ASAKURA, Kentaro (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 4070192, JP)
Application Number:
JP2007/065854
Publication Date:
March 13, 2008
Filing Date:
August 14, 2007
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku Tokyo, 81, 1078481, JP)
東京エレクトロン株式会社 (〒81 東京都港区赤坂五丁目３番６号 Tokyo, 1078481, JP)
東京エレクトロン株式会社 (〒81 東京都港区赤坂五丁目３番６号 Tokyo, 1078481, JP)
International Classes:
G01K1/14; G01K7/02; H01L21/205; H01L21/3065; G01K1/14; G01K7/02; H01L21/02
Attorney, Agent or Firm:
YOSHITAKE, Kenji et al. (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, 1000005, JP)
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