Title:
TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND TEMPERATURE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/145305
Kind Code:
A1
Abstract:
A temperature measuring probe is characterized in that it has a film 4 on a part of a first surface of a cantilever 2 having an opening in the center, the film 4 is formed of a material different in coefficient of thermal expansion from the cantilever 2, it has a film 5 on a part of a surface of the cantilever 2 opposite to the first surface, the film 5 is formed of the same material as the film 4, and when the films 4 and 5 are projected onto a plane parallel to the cantilever 2, the projection image of the film 4 and the projection image of the film 5 do not coincide. Thus, a temperature measuring probe and a temperature measuring apparatus can be made that can be used with a general-purpose scanning probe microscope and is insusceptible to thermal deformation of a sample.
Inventors:
OJIMA, Kaoru (C/O CANON KABUSHIKI KAISHA, 30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, 14685, JP)
Application Number:
JP2011/002668
Publication Date:
November 24, 2011
Filing Date:
May 13, 2011
Export Citation:
Assignee:
CANON KABUSHIKI KAISHA (30-2, Shimomaruko 3-chome Ohta-k, Tokyo 01, 14685, JP)
OJIMA, Kaoru (C/O CANON KABUSHIKI KAISHA, 30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, 14685, JP)
OJIMA, Kaoru (C/O CANON KABUSHIKI KAISHA, 30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, 14685, JP)
International Classes:
G01K5/48; G01K5/64; G01K5/68; G01Q60/58
Attorney, Agent or Firm:
ABE, Takuma et al. (C/O CANON KABUSHIKI KAISHA, 30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, 14685, JP)
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Claims: