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Patent Searching and Data


Title:
TEMPERATURE MEASURING SYSTEM AND TEMPERATURE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2004/104535
Kind Code:
A1
Abstract:
A temperature measuring system (100) comprises a first temperature measuring body (101) for measuring the temperature of an object to be measured (APM), a second temperature measuring body (102) for measuring the temperature of the object to be measured (APM), and a monitor unit (120) for monitoring respective temperatures measured by the first temperature measuring body (101) and the second temperature measuring body (102). By monitoring the difference between the temperature measured by the first temperature measuring body (101) and the temperature measured by the second temperature measuring body (102) using the monitor unit (120), it can be detected if there is a problem with the first temperature measuring body (101) or the second temperature measuring body (102).

Inventors:
NAKATOU ISAMU (JP)
Application Number:
PCT/JP2004/007096
Publication Date:
December 02, 2004
Filing Date:
May 25, 2004
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
NAKATOU ISAMU (JP)
International Classes:
G01K15/00; (IPC1-7): G01K7/24; G01K1/14; G01K7/02; H01L21/304
Foreign References:
JPS4968477U1974-06-14
JPH06120203A1994-04-28
JPH11118620A1999-04-30
JPH02254330A1990-10-15
Attorney, Agent or Firm:
Yoshitake, Kenji (Room 323 Fuji Bldg., 2--3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, JP)
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