Title:
TEMPERATURE SENSING DEVICE, HEATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/087356
Kind Code:
A1
Abstract:
Disclosed is technology to control the temperature in large-scale heated substrates. A temperature sensing device (20) is disposed lateral to a region in which a radiant heating means (14) faces a heated substrate (12) inside a heating chamber (6). A heating device (2) comprises the heating chamber (6), the radiant heating means (14), a power supply device (25), a substrate holding device (11), a control device (15), and a temperature sensing device (20). A control program is built into the control device (15), and the power supply device (25) controls turning power on to the radiant heating means (14) according to the control program, whereby heat is generated so that the temperature of a temperature measurement substrate (22), sensed by a thermocouple (21) of the temperature sensing device (20), reaches a set temperature. In addition, an annular path (23) is disposed adhered to the temperature sensing device (20), and when a cooling device (29) causes a coolant to flow through the annular path (23), the temperature of the temperature measurement substrate (22) can be cooled from the set temperature to an initial temperature.
Inventors:
YOSHIMOTO Tsuyoshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
吉元 剛 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
YAMANE Katsumi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
山根 克己 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
吉元 剛 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
YAMANE Katsumi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
山根 克己 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
Application Number:
JP2010/051012
Publication Date:
August 05, 2010
Filing Date:
January 27, 2010
Export Citation:
Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
YOSHIMOTO Tsuyoshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
吉元 剛 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
YAMANE Katsumi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
YOSHIMOTO Tsuyoshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
吉元 剛 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
YAMANE Katsumi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
International Classes:
F27D21/00; F27D19/00; G01K1/16; H05B3/00
Attorney, Agent or Firm:
ISHIJIMA Shigeo et al. (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)
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