Title:
TEMPERATURE-SENSITIVE AND STRAIN-SENSITIVE COMPOSITE SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/053606
Kind Code:
A1
Abstract:
Provided is a temperature-sensitive and strain-sensitive composite sensor having: a resistive film for strain sensitivity, represented by the general formula Cr(100-x-y)AlxNy, where the respective composition ranges for x and y are 5 < x ≤ 50 and 0.1 ≤ y ≤ 20; and a resistive film for temperature sensitivity, in which the absolute value of the temperature coefficient of resistance (TCR) in the temperature range of -50°C to 450°C is 2000 ppm/°C or greater.
Inventors:
NAWAOKA KOHEI (JP)
UNNO KEN (JP)
KOBAYASHI MASANORI (JP)
SASAHARA TETSUYA (JP)
UNNO KEN (JP)
KOBAYASHI MASANORI (JP)
SASAHARA TETSUYA (JP)
Application Number:
PCT/JP2022/024342
Publication Date:
April 06, 2023
Filing Date:
June 17, 2022
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01L9/04; G01K7/22; G01L1/22
Foreign References:
| JP2002048607A | 2002-02-15 | |||
| JP2019192740A | 2019-10-31 | |||
| JPH03133101A | 1991-06-06 | |||
| JP2021516761A | 2021-07-08 | |||
| US20180180502A1 | 2018-06-28 |
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
Download PDF:
Previous Patent: GAS BURNER AND COMBUSTION FACILITY
Next Patent: PISTON RING COMBINATION, AND INTERNAL COMBUSTION ENGINE
Next Patent: PISTON RING COMBINATION, AND INTERNAL COMBUSTION ENGINE