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Title:
TEMPERATURE SYSTEM HAVING AN IMPURITY FILTER
Document Type and Number:
WIPO Patent Application WO/2013/059307
Kind Code:
A3
Abstract:
A temperature control system for controlling a temperature of a device under test includes a fluid source and a cooling device reducing a temperature of the fluid supplied by the fluid source and outputting the fluid having the reduced temperature to a device under test. A filter is positioned between the device under test and the cooling device to filter out ice particles that lead to significant charge generation in order to prevent the device under test from being subjected to high voltages as a result of static charge generation.

Inventors:
WARD BRITTON N (US)
ELSDOERFER NORBERT W (US)
Application Number:
PCT/US2012/060599
Publication Date:
October 10, 2013
Filing Date:
October 17, 2012
Export Citation:
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Assignee:
TEMPTRONIC CORP (US)
International Classes:
F25B19/00; F28F19/01; F25B43/00; H01L23/34
Foreign References:
JP2006283991A2006-10-19
EP1167905A22002-01-02
JP2011091149A2011-05-06
JP2002224513A2002-08-13
JP2010002136A2010-01-07
JP2001066027A2001-03-16
Attorney, Agent or Firm:
MILLS, Steven, M. (28 State StreetBoston, MA, US)
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