Title:
TEMPERATURE TREATING UNIT AND TEMPERATURE TREATING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2007/111045
Kind Code:
A1
Abstract:
A temperature treating unit comprises a housing (210) for defining a treating chamber (211) performing temperature treating of a plurality of stacked articles to be treated, and a mechanism for circulating fluid in order to perform temperature treating on articles to be treated which are carried into the treating chamber (211). The housing (210) has ports (212, 213) for carrying in and carrying out the article to be treated in the horizontal direction and closed during temperature treating, and a conveyor (260) for carrying in and carrying out the article to be treated in the horizontal direction is arranged below the housing (210). The fluid circulation mechanism is arranged in the housing (210) and formed to jet fluid toward the the opposite sides or underside and the opposite sides of the article to be treated and circulating the fluid while sucking from above the article to be treated. Consequently, atmospheric temperature can be managed with high precision while space saving of installation area is achieved and productivity is enhanced by performing temperature treating stably.
Inventors:
MATSUYOSHI TETSUNORI (JP)
KOMATA HIROAKI (JP)
MORIMOTO KOUJI (JP)
KOMATA HIROAKI (JP)
MORIMOTO KOUJI (JP)
Application Number:
PCT/JP2007/052200
Publication Date:
October 04, 2007
Filing Date:
February 08, 2007
Export Citation:
Assignee:
HIRATA SPINNING (JP)
MATSUYOSHI TETSUNORI (JP)
KOMATA HIROAKI (JP)
MORIMOTO KOUJI (JP)
MATSUYOSHI TETSUNORI (JP)
KOMATA HIROAKI (JP)
MORIMOTO KOUJI (JP)
International Classes:
F27D7/02; F27B9/36; F27D7/04; H01L21/324
Foreign References:
| JP2003225761A | 2003-08-12 | |||
| JP2005231991A | 2005-09-02 | |||
| JPH085254A | 1996-01-12 | |||
| JP2005249248A | 2005-09-15 |
Attorney, Agent or Firm:
YAMAMOTO, Takatoshi (11-5 Nishishinbashi 1-chom, Minato-ku Tokyo 03, JP)
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