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Patent Searching and Data


Title:
TEMPLATE ASSEMBLY SORTING METHOD, WORKPIECE-POLISHING METHOD, AND TEMPLATE ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2017/195460
Kind Code:
A1
Abstract:
The present invention is a template assembly sorting method comprising: a step for preparing template assemblies in which a template with a back pad for holding the back surface of a workpiece and a retainer ring located on the back pad for holding the edge of the workpiece has been glued concentrically on a base ring or base plate with an outside diameter greater than the outside diameter of the template; a step for non-destructively measuring, on the template-side of the template assembly, the distributions of the retainer ring and back pad height positions when the peripheral surface of the base ring or base plate is used as a reference plane; a step for calculating the flatness of the retainer ring and the average level difference between the retainer ring and the back pad from the measured distributions of height positions; and a step for sorting the template assemblies on the basis of flatness and average level difference. Provided thereby is a template assembly sorting method with which variation in workpiece flatness after polishing can be adjusted.

Inventors:
SATO Kazuya (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
KAMIHAMA Naoki (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
HASHIMOTO Hiromasa (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
Application Number:
JP2017/010203
Publication Date:
November 16, 2017
Filing Date:
March 14, 2017
Export Citation:
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Assignee:
SHIN-ETSU HANDOTAI CO.,LTD. (2-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
International Classes:
B24B37/30; G01B11/02; G01B11/24; H01L21/304
Foreign References:
JP2010247254A2010-11-04
JP2014233815A2014-12-15
JP2014184511A2014-10-02
JP2015196211A2015-11-09
JP2009260142A2009-11-05
JP2017087328A2017-05-25
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
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