Title:
TEMPLATE AND SUBSTRATE TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2012/050057
Kind Code:
A1
Abstract:
A template for use in the feeding of a treatment solution to predetermined positions on a substrate comprises; multiple openings which are formed on the surface of the template at positions respectively corresponding to the predetermined positions; flow paths each of which penetrates in a thickness direction from each of the openings to the back surface of the template and through which the treatment solution can flow; first hydrophilic regions each of which is formed around the openings on the surface of the template and has hydrophilicity; and second hydrophilic regions each of which is formed on the inner surface of each of the flow paths and has hydrophilicity. The first hydrophilic regions are formed at position respectively corresponding to hydrophilic patterns, which have hydrophilicity, on portions of the surface of the substrate which surround the predetermined positions.
Inventors:
IWATSU HARUO (JP)
Application Number:
PCT/JP2011/073206
Publication Date:
April 19, 2012
Filing Date:
October 07, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
IWATSU HARUO (JP)
IWATSU HARUO (JP)
International Classes:
C25D5/02; C23F1/02; C25D7/12; H01L21/288; H01L21/306; H01L21/31; H01L21/3205; H01L23/52
Foreign References:
| JP2008280558A | 2008-11-20 | |||
| JP2004006518A | 2004-01-08 | |||
| JP2003253485A | 2003-09-10 |
Attorney, Agent or Firm:
HAGIWARA, Yasushi et al. (JP)
Yasushi Hagiwara (JP)
Yasushi Hagiwara (JP)
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Claims: