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Title:
TEMPORARILY FIXING AGENT FOR SEMICONDUCTOR WAFER, AND PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/147102
Kind Code:
A1
Abstract:
Disclosed are: a temporarily fixing agent for a semiconductor wafer, which can reduce the damage to the semiconductor wafer, enables the easy removal of the semiconductor wafer, and enables the reduction in time required for the thermal decomposition thereof; and a process for producing a semiconductor device using the temporarily fixing agent. Specifically disclosed is a temporarily fixing agent for use in the temporarily fixing of a semiconductor wafer onto a support material for the purpose of processing the semiconductor wafer and the removal of the semiconductor wafer from the support material by heating after the processing, which contains a resin component of which the 50% weight reduction temperature can be decreased after the irradiation with an active energy ray.

Inventors:
TAKEUCHI Etsu (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
竹内 江津 (〒02 東京都品川区東品川2丁目5番8号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
KUSUNOKI Junya (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
楠木 淳也 (〒02 東京都品川区東品川2丁目5番8号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
SUGIYAMA Hiromichi (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
Application Number:
JP2010/060080
Publication Date:
December 23, 2010
Filing Date:
June 15, 2010
Export Citation:
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Assignee:
Sumitomo Bakelite Co., Ltd. (5-8 Higashi-Shinagawa 2-chome, Shinagawa-ku Tokyo, 02, 〒1400002, JP)
住友ベークライト株式会社 (〒02 東京都品川区東品川2丁目5番8号 Tokyo, 〒1400002, JP)
TAKEUCHI Etsu (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
竹内 江津 (〒02 東京都品川区東品川2丁目5番8号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
KUSUNOKI Junya (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
楠木 淳也 (〒02 東京都品川区東品川2丁目5番8号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
International Classes:
C09J201/00; C09J5/06; H01L21/304
Attorney, Agent or Firm:
SONODA Yoshitaka et al. (SONODA & KOBAYASHI, 34th Floor Shinjuku Mitsui Building, 1-1, Nishi-Shinjuku 2-chome, Shinjuku-k, Tokyo 34, 〒1630434, JP)
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