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Patent Searching and Data


Title:
TEMPORARILY FIXING AGENT FOR SEMICONDUCTOR WAFER, AND PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/147103
Kind Code:
A1
Abstract:
Disclosed are: a temporarily fixing agent for a semiconductor wafer, which can reduce the damage to the semiconductor wafer, enables the easy removal of the semiconductor wafer, and enables the reduction in time required for the thermal decomposition thereof; and a process for producing a semiconductor device using the temporarily fixing agent. Specifically disclosed is a temporarily fixing agent for use in the temporarily fixing of a semiconductor wafer onto a support material for the purpose of processing the semiconductor wafer and the removal of the semiconductor wafer from the support material by heating after the processing, which contains a resin component of which the difference between the 95% weight reduction temperature and the 5% weight reduction temperature meets the requirement represented by the following formula: 1˚C ≤ (95% weight reduction temperature) - (5% weight reduction temperature) ≤ 300˚C.

Inventors:
TAKEUCHI ETSU (JP)
KUSUNOKI JUNYA (JP)
SUGIYAMA HIROMICHI (JP)
KUBOYAMA TOSHIHARU (JP)
KAWATA MASAKAZU (JP)
Application Number:
PCT/JP2010/060081
Publication Date:
December 23, 2010
Filing Date:
June 15, 2010
Export Citation:
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Assignee:
SUMITOMO BAKELITE CO (JP)
TAKEUCHI ETSU (JP)
KUSUNOKI JUNYA (JP)
SUGIYAMA HIROMICHI (JP)
KUBOYAMA TOSHIHARU (JP)
KAWATA MASAKAZU (JP)
International Classes:
C09J201/00; C09J145/00; C09J169/00; H01L21/683
Domestic Patent References:
WO1997033198A11997-09-12
WO2000020472A12000-04-13
Foreign References:
JP2004186263A2004-07-02
JP2001519049A2001-10-16
JP2007535825A2007-12-06
JP2004256788A2004-09-16
JP2005232320A2005-09-02
JP2005232321A2005-09-02
JP2006504853A2006-02-09
JP2006503335A2006-01-26
Other References:
"Encyclopedia of Polymer Science", 1988, JOHN WILEY AND SONS, pages: 13708
Attorney, Agent or Firm:
SONODA Yoshitaka et al. (JP)
Yoshitaka Sonoda (JP)
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