Title:
TEMPORARILY PLACING DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/029751
Kind Code:
A1
Abstract:
A temporarily placing device (1) is provided with a transfer device (5) that has: the placing surface (21), on which a subject to be carried, such as a substrate housing cassette (3), can be temporarily placed; and a driving unit (19), which drives the placing surface (21), and which can transfer the subject by driving the placing surface (21). The temporarily placing device is also provided with a carrying device, such as a carrying vehicle (2), which can have the subject temporarily placed thereon, and which can carry out the subject temporarily placed by the transfer device (5). At a position adjacent to the transfer device, the carrying device can deliver and receive the subject to and from the transfer device.
Inventors:
MATSUYAMA AKIO
Application Number:
PCT/JP2011/069551
Publication Date:
March 08, 2012
Filing Date:
August 30, 2011
Export Citation:
Assignee:
SHARP KK (JP)
MATSUYAMA AKIO
MATSUYAMA AKIO
International Classes:
B65G1/133; B65G49/06; H01L21/673
Foreign References:
| JP2004307125A | 2004-11-04 | |||
| JPH06271016A | 1994-09-27 | |||
| JPH03106707A | 1991-05-07 | |||
| JPS4733230B1 | ||||
| JPS6236202A | 1987-02-17 | |||
| JPH02261701A | 1990-10-24 | |||
| JPH02100904A | 1990-04-12 | |||
| JPS6331911A | 1988-02-10 | |||
| JPS55123814A | 1980-09-24 | |||
| JP2009046242A | 2009-03-05 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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Claims: