TEMPORARY ADHESIVE CONTAINING EPOXY-MODIFIED POLYSILOXANE

Title:

TEMPORARY ADHESIVE CONTAINING EPOXY-MODIFIED POLYSILOXANE

Document Type and Number:

WIPO Patent Application WO/2018/216732

Kind Code:

A1

Abstract:

[Problem] To provide: a temporary adhesive which has excellent spin coatability to a supporting body or a circuit surface of a wafer, while exhibiting excellent heat resistance during bonding to an adhesive layer or processing of a wafer back surface, and which is able to be easily separated after polishing of the wafer back surface, with a residue thereof adhering to the wafer or the supporting body being easily removed after the separation; a laminate of this temporary adhesive; and a processing method which uses this temporary adhesive. [Solution] An adhesive which is used for the purpose of removably bonding a supporting body and a circuit surface of a wafer in order to process the back surface of the wafer, and which contains a component (A) that is cured by a hydrosilylation reaction and a component (B) that contains an epoxy-modified polyorganosiloxane, and wherein the ratio of the component (A) to the component (B) is from 99.995:0.005 to 30:70 in mass%. The component (B) is an epoxy-modified polyorganosiloxane which has an epoxy value within the range of 0.1-5. A method for forming a laminate, which comprises: a first step wherein an adhesive is applied over the surface of a first base material, thereby forming an adhesive layer; a second step wherein a second base material is bonded to the adhesive layer; and a third step wherein the adhesive layer is cured by being heated from the first base material side.

Inventors:

SAWADA KAZUHIRO (JP)
SHINJO TETSUYA (JP)
OGINO HIROSHI (JP)
KAMIBAYASHI SATOSHI (JP)
MORIYA SHUNSUKE (JP)

Application Number:

PCT/JP2018/019849

Publication Date:

November 29, 2018

Filing Date:

May 23, 2018

Export Citation:

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Assignee:

NISSAN CHEMICAL CORP (JP)

International Classes:

C09J183/06; C09J183/05; C09J183/07; H01L21/02

Domestic Patent References:

WO2015186324A1	2015-12-10
WO2015190438A1	2015-12-17
WO2017221772A1	2017-12-28

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