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Title:
TEMPORARY ADHESIVE FOR SEMICONDUCTOR DEVICE PRODUCTION, ADHESIVE SUPPORTING BODY USING SAME, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/187244
Kind Code:
A1
Abstract:
Provided are: a temporary adhesive for semiconductor device production, which is capable of temporarily supporting a member to be processed (such as a semiconductor wafer) easily and reliably when the member to be processed is mechanically or chemically processed, and which enables easy removal of the temporary support from the processed member without damaging the processed member; and an adhesive supporting body and a method for producing a semiconductor device, each of which uses the temporary adhesive for semiconductor device production. A temporary adhesive for semiconductor device production, which contains (A) a polymer compound having an acid group, (B) a diluent and (C) a solvent; and an adhesive supporting body and a method for producing a semiconductor device, each of which uses this temporary adhesive for semiconductor device production.

Inventors:
FUJIMAKI KAZUHIRO (JP)
KOYAMA ICHIRO (JP)
NAKAMURA ATSUSHI (JP)
IWAI YU (JP)
TAN SHIRO (JP)
Application Number:
PCT/JP2013/065102
Publication Date:
December 19, 2013
Filing Date:
May 30, 2013
Export Citation:
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Assignee:
FUJIFILM CORP (JP)
International Classes:
C09J201/02; C09J7/20; C09J7/38; C09J11/06; C09J133/00; C09J161/06; C09J175/04; H01L21/304; H01L23/12
Foreign References:
JP2006111651A2006-04-27
JP2000345131A2000-12-12
JP2007056066A2007-03-08
Attorney, Agent or Firm:
TAKAMATSU Takeshi et al. (JP)
Takamatsu 猛 (JP)
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