Title:
TERAHERTZ ELEMENT MODULE
Document Type and Number:
WIPO Patent Application WO/2016/181727
Kind Code:
A1
Abstract:
A terahertz element module (100) is provided with the following: a substrate (10); a terahertz element (30) which is disposed on the surface of the substrate (10) and which produces terahertz waves by oscillation, or detects terahertz waves; a cap (12) which is spaced apart from the terahertz element (30) and covers the terahertz element (30), and which has an opening OP provided at a position that is in a direction orthogonal to the surface of the substrate (10) and that faces the terahertz element (30); and a sealing material (14) which covers the opening OP of the cap (12) and which seals the terahertz element (30) together with the substrate (10) and the cap (12). The distance from the terahertz element (30) to the sealing material (14) is no more than a near field which is the electric field of the terahertz wave continuously reaching from the surface of the terahertz element (30) to the sealing material (14). Provided is the terahertz element module which enables terahertz waves to be efficiently emitted through the opening of the cap, or terahertz waves to be detected therethrough, thereby suppressing an increase in the size of the cap.
Inventors:
MUKAI TOSHIKAZU (JP)
KIM JAE-YOUNG (JP)
TSURUDA KAZUISAO (JP)
KIM JAE-YOUNG (JP)
TSURUDA KAZUISAO (JP)
Application Number:
PCT/JP2016/061241
Publication Date:
November 17, 2016
Filing Date:
April 06, 2016
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
H03B7/08
Foreign References:
| JP2005322733A | 2005-11-17 | |||
| JP2013171966A | 2013-09-02 | |||
| JPS4893248A | 1973-12-03 | |||
| JP2011124314A | 2011-06-23 |
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (JP)
Hidekazu Miyoshi (JP)
Hidekazu Miyoshi (JP)
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