TERAHERTZ ELEMENT AND SEMICONDUCTOR DEVICE

Title:

TERAHERTZ ELEMENT AND SEMICONDUCTOR DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/004204

Kind Code:

A1

Abstract:

A terahertz element provided according to one aspect of the present disclosure comprises: a semiconductor substrate; a first conductive layer; a second conductive layer; and an active element. The first conductive layer and the second conductive layer are respectively formed on the semiconductor substrate and are insulated from each other. The active element is formed on the semiconductor substrate and is electrically conductive to the first conductive layer and the second conductive layer. The first conductive layer includes: a first antenna part that extends along a first direction; a first capacitor part that is positioned on a second direction side relative to the active element when viewing the semiconductor substrate from the thickness direction; and a first conductive part that is connected to the first capacitor part. The second direction is orthogonal to the thickness direction and the first direction. The second conductive layer includes a second capacitor part. The second capacitor part is layered on the first capacitor part and is insulated from the first capacitor part. The semiconductor substrate includes an exposed part that is exposed from the first capacitor part and the second capacitor part. The first conductive part has an area that is separated in the second direction from the first antenna part with the exposed part therebetween when viewed from the thickness direction.

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Inventors:

MUKAI TOSHIKAZU (JP)
KIM JAE YOUNG (JP)
TOYAMA TOMOICHIRO (JP)

Application Number:

PCT/JP2018/024179

Publication Date:

January 03, 2019

Filing Date:

June 26, 2018

Export Citation:

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Assignee:

ROHM CO LTD (JP)

International Classes:

H01L21/822; H01L21/329; H01L27/04; H01L29/66; H01L29/88; H01Q9/16; H03B1/00; H03B7/08

Domestic Patent References:

WO2016092886A1

2016-06-16

Foreign References:

JP2016158023A	2016-09-01
JP2016213732A	2016-12-15
JP2004335805A	2004-11-25
JPH0321857U	1991-03-05
JP2010135500A	2010-06-17
JP2010135453A	2010-06-17

Attorney, Agent or Firm:

YOSHIDA Minoru et al. (JP)

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