Title:
TERAHERTZ WAVE DETECTOR, AND PROCESS FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2011/142191
Kind Code:
A1
Abstract:
A terahertz wave detector (1) comprising: a substrate (3) and a substrate (4) which are joined to each other so as to form an internal space (2); an antenna main body (11) which is formed on the substrate (3) and can receive a terahertz wave and convert the terahertz wave into an electric current; an insulating film (12) which is supported on the substrate (4) through an air gap in the internal space (2); a resistive film (13) which is formed on one surface (12a) of the insulating film (12) and can generate heat corresponding to the electric current that has been converted by the antenna main body (11); a bolometer film (14) which is formed on the other surface (12b) of the insulating film (12) and of which the electric resistivity can vary in accordance with the heat generated in the resistive film (13); an antenna wiring line (15) which is formed on the substrate (4) and is electrically connected to the antenna main body (11) and the resistive film (13) for the purpose of supplying an electric current from the antenna main body (11) to the resistive film (13); and a bolometer wiring line (16) which is formed on the substrate (4) and is electrically connected to the bolometer film (14) for the purpose of obtaining a signal corresponding to the electric resistivity.
Inventors:
SUZUKI Jun (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
ISHIHARA Masatoshi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
石原 正敏 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
OJIMA Fumikazu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
ISHIHARA Masatoshi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
石原 正敏 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
OJIMA Fumikazu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
Application Number:
JP2011/058453
Publication Date:
November 17, 2011
Filing Date:
April 01, 2011
Export Citation:
Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
SUZUKI Jun (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
ISHIHARA Masatoshi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
石原 正敏 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
SUZUKI Jun (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
ISHIHARA Masatoshi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
石原 正敏 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
International Classes:
G01J1/02
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
Claims:
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