Title:
TEST METHOD AND TEST APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/134190
Kind Code:
A1
Abstract:
A test method and a test apparatus. The method comprises: acquiring coordinates of a test point of a sample under test; driving, according to the coordinates of the test point of the sample under test, a probe to a position corresponding to the coordinates of the test point to perform testing, and acquiring a first test result; if the first test result falls outside a predetermined range, retesting the position corresponding to the coordinates of the test point, and acquiring a second test result; and after acquiring the second test result, driving, according to a preset test mode, the probe to a next test point of the sample under test to perform testing.
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Inventors:
HE HUAILIANG (CN)
Application Number:
PCT/CN2018/072855
Publication Date:
July 11, 2019
Filing Date:
January 16, 2018
Export Citation:
Assignee:
HKC CORP LTD (CN)
International Classes:
G01R31/28
Foreign References:
| CN103439643A | 2013-12-11 | |||
| CN102707215A | 2012-10-03 | |||
| CN101958263A | 2011-01-26 |
Attorney, Agent or Firm:
SHENZHEN ZHONGYI PATENT AND TRADEMARK OFFICE (CN)
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