Title:
TEXTURE ETCHING SOLUTION COMPOSITION OF A CRYSTALLINE SILICON WAFER AND TEXTURE ETCHING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/089338
Kind Code:
A1
Abstract:
The present invention relates to a texture etching solution composition of a crystalline silicon wafer and to a texture etching method, and more particularly, to a texture etching solution composition containing a polycarboxylic acid-based polymer and a salt thereof to form a uniform fine pyramid structure on the surface of a crystalline silicon wafer to thereby manufacture a texture having low optical reflection, and to a texture etching method.
Inventors:
PARK MYUN KYU (KR)
LEE JAE YOUN (KR)
HONG HYUNG PYO (KR)
LEE JAE YOUN (KR)
HONG HYUNG PYO (KR)
Application Number:
PCT/KR2012/007131
Publication Date:
June 20, 2013
Filing Date:
September 05, 2012
Export Citation:
Assignee:
DONGWOO FINE CHEM CO LTD (KR)
PARK MYUN KYU (KR)
LEE JAE YOUN (KR)
HONG HYUNG PYO (KR)
PARK MYUN KYU (KR)
LEE JAE YOUN (KR)
HONG HYUNG PYO (KR)
International Classes:
C09K13/06; C09K13/08
Domestic Patent References:
WO2010085928A1 | 2010-08-05 | |||
WO2009072438A1 | 2009-06-11 | |||
WO2007129555A1 | 2007-11-15 |
Foreign References:
KR20100093098A | 2010-08-24 | |||
JP2010141139A | 2010-06-24 | |||
KR20120056230A | 2012-06-01 | |||
KR20110009641A | 2011-01-28 | |||
KR20120044013A | 2012-05-07 | |||
JP2011256264A | 2011-12-22 |
Attorney, Agent or Firm:
LEE, Joon Ho et al. (KR)
이준호 (KR)
이준호 (KR)
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Claims: