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Title:
TFT SUBSTRATE, SCANNING ANTENNA COMPRISING TFT SUBSTRATE, AND TFT SUBSTRATE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/105589
Kind Code:
A1
Abstract:
A TFT substrate (105) having a dielectric substrate (1) and a plurality of antenna unit areas (U) arranged upon the dielectric substrate. Each of the plurality of antenna unit areas has a TFT (10) and a patch electrode (7PE) connected to a drain electrode (7D) in the TFT. The TFT substrate has: a source metal layer (7) supported by the dielectric substrate and including a TFT source electrode (7S), the drain electrode, a source bus line (SL) connected to the source electrode, and the patch electrode; a gate metal layer (3) formed upon the source metal layer and including a TFT gate electrode (3G) and a gate bus line (GL) connected to the gate electrode; a gate insulation layer (4) formed between the source metal layer and the gate metal layer; and an interlayer insulation layer (11) formed upon the gate metal layer.

Inventors:
MISAKI KATSUNORI
Application Number:
JP2017/043581
Publication Date:
June 14, 2018
Filing Date:
December 05, 2017
Export Citation:
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Assignee:
SHARP KK (JP)
International Classes:
H01L29/786; G02F1/13; H01L21/336; H01Q3/34; H01Q3/44; H01Q13/22
Domestic Patent References:
WO2015126550A12015-08-27
Foreign References:
JP2000196334A2000-07-14
JP2000022428A2000-01-21
JP2007295044A2007-11-08
JP2009538565A2009-11-05
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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