Title:
TFT SUBSTRATE, SCANNING ANTENNA COMPRISING TFT SUBSTRATE, AND METHOD FOR PRODUCING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/123696
Kind Code:
A1
Abstract:
A TFT substrate (105) comprises: a transmission/reception region (R1) that includes a plurality of antenna unit regions (U); and a non-transmission/reception region (R2) that is located where the transmission/reception region is not. Each of the plurality of antenna unit regions has a TFT (10), and a patch electrode (3PE) that is electrically connected to a drain electrode (7D) for the TFT. The TFT substrate has: a source metal layer (7) that includes source electrodes (7S), the drain electrodes, and source bus lines (SL) for the TFTs; a gate metal layer (3) that is formed upon the source metal layer and includes gate electrodes (3G) and gate bus lines (GL) for the TFTs; a gate insulating layer (4) that is formed between the source metal layer and the gate metal layer; an interlayer insulating layer (11) that is formed upon the gate metal layer; and a conductive layer (19) that is formed upon the interlayer insulating layer. The patch electrodes are included in the gate metal layer.
Inventors:
MISAKI KATSUNORI
Application Number:
PCT/JP2017/045387
Publication Date:
July 05, 2018
Filing Date:
December 18, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L29/786; G02F1/13; H01Q3/34; H01Q3/44; H01Q13/22
Domestic Patent References:
| WO2015126550A1 | 2015-08-27 |
Foreign References:
| JP2000196334A | 2000-07-14 | |||
| JP2000022428A | 2000-01-21 | |||
| JP2007295044A | 2007-11-08 | |||
| JP2009538565A | 2009-11-05 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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