Title:
TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE, AND METHOD FOR PRODUCING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2017/213084
Kind Code:
A1
Abstract:
Provided is a TFT substrate (105) having a dielectric substrate (1) and a plurality of antenna unit regions (U) arranged on the dielectric substrate. The TFT substrate (105) comprises a transmission/reception region (R1) including the plurality of antenna unit regions and a non-transmission/reception region (R2) positioned in a region other than the transmission/reception region. Each of the plurality of antenna unit regions is provided with: a TFT (10) that is supported by the dielectric substrate and that comprises a gate electrode (3), a semiconductor layer (5), a gate insulating layer (4) formed between the gate electrode and the semiconductor layer, and a source electrode (7S) and a drain electrode (7D) electrically connected to the semiconductor layer; and a patch electrode (3PE) electrically connected to the drain electrode of the TFT. The patch electrode is formed from the same conductive film as the gate electrode.
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Inventors:
MISAKI KATSUNORI
Application Number:
PCT/JP2017/020824
Publication Date:
December 14, 2017
Filing Date:
June 05, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L29/786; G02F1/13; G02F1/1368; H01Q3/34; H01Q3/44; H01Q13/22
Domestic Patent References:
| WO2006043673A1 | 2006-04-27 |
Foreign References:
| JP2009538565A | 2009-11-05 | |||
| JP2000022428A | 2000-01-21 | |||
| JP2014531843A | 2014-11-27 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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