Title:
TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE, AND METHOD FOR PRODUCING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/186309
Kind Code:
A1
Abstract:
This TFT substrate (105A) is provided with: a transmission/reception area (R1) including a plurality of antenna unit areas (U); and a non-transmission/reception area (R2) positioned in an area other than the transmission/reception area. Each of the plurality of antenna unit areas is provided with: a TFT (10); and a patch electrode (3PE) which is electrically connected to a drain electrode (7D) of the TFT. The TFT substrate is provided with: a source metal layer (7) including source electrodes (7S) of the TFTs, the drain electrodes, and source bus lines (SL); a gate metal layer (3) which is formed on the source metal layer, and includes gate electrodes (3G) of the TFTs, gate bus lines (GL), and the patch electrodes; a gate insulation layer (4) which is formed between the source metal layer and the gate metal layer; and a conductive layer (19) which is formed on the gate metal layer. An insulation layer is not provided between the gate metal layer and the conductive layer.
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Inventors:
MISAKI KATSUNORI
Application Number:
PCT/JP2018/013882
Publication Date:
October 11, 2018
Filing Date:
March 30, 2018
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L29/786; H01Q3/34; H01Q3/44; H01Q13/22; H01Q21/06
Foreign References:
| JP2014531843A | 2014-11-27 | |||
| JP2014202838A | 2014-10-27 | |||
| JP2009538565A | 2009-11-05 | |||
| JP2007295044A | 2007-11-08 | |||
| JP2007110256A | 2007-04-26 | |||
| JP2000022428A | 2000-01-21 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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