Title:
THERMAL ACTUATOR
Document Type and Number:
WIPO Patent Application WO2004089814
Kind Code:
A3
Abstract:
An asymmetric MEMS thermal actuator device includes a base portion, typically a pair of bond pads, and an actuator element connected to the base portion by a flexure portion. The actuator element has a first arm and a second arm alongside the first arm and spaced from the first arm. The second arm is wider than the first arm so that the actuator element deflects about the flexure element due to differential heating in the first and second arms when an electrical current is passed therethrough. A cut-out portion is provided in the second arm adjacent the first arm so as to increase the spacing therefrom over at least a portion of the second arm. Preferably, a heat sink is also provided laterally adjacent the second arm.
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Inventors:
HICKEY RYAN MURRAY (CA)
Application Number:
PCT/CA2004/000528
Publication Date:
May 19, 2005
Filing Date:
April 07, 2004
Export Citation:
Assignee:
BOOKHAM TECHNOLOGY PLC (GB)
HICKEY RYAN MURRAY (CA)
HICKEY RYAN MURRAY (CA)
International Classes:
B81B3/00; G02B26/08; G11B5/56; G11B21/24; (IPC1-7): B82B3/00
Domestic Patent References:
| WO2002017339A1 | 2002-02-28 |
Foreign References:
| US20030002133A1 | 2003-01-02 | |||
| US6531947B1 | 2003-03-11 | |||
| US6483419B1 | 2002-11-19 |
Other References:
FIELD L A ET AL: "Micromachined 1x2 Optical Fiber Switch", 8TH INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS AND ACTUATORS, vol. 1, 25 June 1995 (1995-06-25), STOCKHOLM, pages 344 - 347, XP010304879
KO-MIN LIAO ET AL: "A novel electro-thermally driven Bi-directional microactuator", MICROMECHATRONICS AND HUMAN SCIENCE, 2002. MHS 2002. PROCEEDINGS OF 2002 INTERNATIONAL SYMPOSIUM ON OCT. 20-23, 2002, PISCATAWAY, NJ, USA,IEEE, 20 October 2002 (2002-10-20), pages 267 - 274, XP010616788, ISBN: 0-7803-7611-0
KOLESAR E S ET AL: "Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine", PREPARATION AND CHARACTERIZATION, ELSEVIER SEQUOIA, NL, vol. 420-421, 2 December 2002 (2002-12-02), pages 530 - 538, XP004397900, ISSN: 0040-6090
KO-MIN LIAO ET AL: "A novel electro-thermally driven Bi-directional microactuator", MICROMECHATRONICS AND HUMAN SCIENCE, 2002. MHS 2002. PROCEEDINGS OF 2002 INTERNATIONAL SYMPOSIUM ON OCT. 20-23, 2002, PISCATAWAY, NJ, USA,IEEE, 20 October 2002 (2002-10-20), pages 267 - 274, XP010616788, ISBN: 0-7803-7611-0
KOLESAR E S ET AL: "Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine", PREPARATION AND CHARACTERIZATION, ELSEVIER SEQUOIA, NL, vol. 420-421, 2 December 2002 (2002-12-02), pages 530 - 538, XP004397900, ISSN: 0040-6090
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