Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
THERMAL CONDUCTIVITY MEASUREMENT DEVICE, THERMAL CONDUCTIVITY MEASUREMENT METHOD, AND VACUUM EVALUATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/100608
Kind Code:
A1
Abstract:
The present invention is provided with: a heat generation source disposed so as to be in contact with an object subject to thermal conductivity measurement; a thermal resistance material disposed so as to be in contact with the heat generation source; at least a pair of differential thermocouples for measuring the voltage value arising from the difference in temperature between two points on the thermal resistance material, the difference being generated by the flow of heat from the heat generation source; and a calculation device for computing the rate at which the voltage output from the differential thermocouples changes over time, and for computing, on the basis of the computed rate of change over time, thermal conductivity of the object subject to thermal conductivity measurement.

Inventors:
HASEGAWA TOSHIKAZU (JP)
GOTO YUKIHIRO (JP)
CHIBA ISAMU (JP)
Application Number:
PCT/JP2016/085315
Publication Date:
June 07, 2018
Filing Date:
November 29, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
EKO INSTR CO LTD (JP)
International Classes:
G01N25/18
Foreign References:
JP2002131257A2002-05-09
JPS59178348A1984-10-09
JP2017026385A2017-02-02
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Download PDF: