Title:
THERMAL CONVECTION ACCELEROMETER WITH CLOSED-LOOP HEATER CONTROL
Document Type and Number:
WIPO Patent Application WO2002041007
Kind Code:
A3
Abstract:
An integrated convective accelerometer device (Figure 1, 100, 102, 104, 106, 108, 110, 112, 114, 116, 118, 120, 122, 124, 128, 130, 132, 134, 136). The device includes a thermal acceleration sensor having a thermopile and a heater element; control circuitry for providing closed-loop control of the thermopile common-mode voltage; an instrumentation amplifier; clock generation circuitry; voltage reference circuitry; a temperature sensor; and, output amplifiers. The device can be operated in an absolute or ratiometric mode. Further, the device is formed in a silicon substrate using standard semiconductor processes and is packaged in a standard integrated circuit package.
Inventors:
ZHAO YANG
BROKAW ADRIAN PAUL
REBESCHINI MICHAEL E
LEUNG ALBERT M
PUCCI GREGORY P
DRIBINSKY ALEXANDER
BROKAW ADRIAN PAUL
REBESCHINI MICHAEL E
LEUNG ALBERT M
PUCCI GREGORY P
DRIBINSKY ALEXANDER
Application Number:
PCT/US2001/051364
Publication Date:
August 01, 2002
Filing Date:
October 24, 2001
Export Citation:
Assignee:
MEMSIC INC (US)
ANALOG DEVICES INC (US)
ANALOG DEVICES INC (US)
International Classes:
G01C19/00; G01P15/00; G01P15/02; G01P15/08; G01P15/12; (IPC1-7): H01L21/00
Foreign References:
| US6171880B1 | 2001-01-09 | |||
| US5581034A | 1996-12-03 |
Other References:
K. WILLIAMS, J. MAXWELL: "Freeform fabrication of functional microsolenoids, electromagnetics and helical spring using high-pressure laser chemical vapor deposition", INSTITUTE FOR MICROMANUFACTURING, LOUISIANA TECHNICAL UNIVERSITY, K. LARSSON, M. BOMAM, DEPARTMENT OF INORGANIC CHEMISTRY, ANGSTROM LABORATORY, UPPSALA UNIVERSITY, IEEE, 1999, UPPSALA, SWEEDEN, pages 232 - 237, XP000830753
A.M. LEUNG ET AL.: "Micromachined accelerometer based on convection heat transfer", SCHOOL OF ENGINEERING SCIENCE, SIMON FRASER UNIVERSITY, IEEE, 1998, BURNABY, BRITISCH COLUMBIA, pages 627 - 630, XP000827820
VELJKO MILANOVI ET AL.: "Convection-based accelerometer and tilt sensor implemented in standard CMOS", INTERNATIONAL MECHANICAL ENGINEERING CONFERENCE AND EXPOSITION, MEMS SYMPOSIA, November 1998 (1998-11-01), pages 1 - 4, XP002950380
My Work on MEMS, Christian Zincke; September 1999, The George Washington University, School of Engineering and Applied Science
A.M. LEUNG ET AL.: "Micromachined accelerometer based on convection heat transfer", SCHOOL OF ENGINEERING SCIENCE, SIMON FRASER UNIVERSITY, IEEE, 1998, BURNABY, BRITISCH COLUMBIA, pages 627 - 630, XP000827820
VELJKO MILANOVI ET AL.: "Convection-based accelerometer and tilt sensor implemented in standard CMOS", INTERNATIONAL MECHANICAL ENGINEERING CONFERENCE AND EXPOSITION, MEMS SYMPOSIA, November 1998 (1998-11-01), pages 1 - 4, XP002950380
My Work on MEMS, Christian Zincke; September 1999, The George Washington University, School of Engineering and Applied Science
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