THERMAL DIFFUSION FACTOR MEASUREMENT DEVICE, THERMAL DIFFUSION FACTOR MEASUREMENT METHOD AND PROGRAM

WIPO Patent Application WO/2017/175795

A1

[Problem] To provide a thermal diffusion factor measurement device, a thermal diffusion factor measurement method and a program capable of measuring thermal diffusion with high accuracy, even when an object to be measured has anisotropy in which thermal diffusion factors differ greatly between the in-plane direction and the thickness direction, and a thick thickness. [Solution] In a thermal diffusion factor measurement method, a heating location H on a tabular sample is made to generate periodically varying thermal waves and the thermal waves at a detection location S on the sample are detected by a non-contact temperature sensor. In addition, the phase delay of the thermal waves at the detection location S are detected in consideration of a detection sensitivity distribution DS of the non-contact temperature sensor and the thermal diffusion factor in the in-plane direction of the sample is measured using the phase delay.

AWANO TAKAAKI (JP)
HATORI KIMIHITO (JP)
SEKINE MAKOTO (JP)
KUBOTA TAKAHIKO (JP)
NAGANO HOSEI (JP)
FUJITA RYOHEI (JP)

PCT/JP2017/014223

October 12, 2017

April 05, 2017

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BETEL CO LTD (JP)
NAT UNIV CORP NAGOYA UNIV (JP)

G01N25/18

JP2015108546A	2015-06-11
JP2014160038A	2014-09-04

SHINOHARA ET AL, THE JAPAN INSTITUTE OF METALS 2016 NEN (DAI 158 KAI) SHUNKI KOEN TAIKAI KOEN GAIYOSHU, 9 March 2016 (2016-03-09), pages 133

IP-FOCUS PATENT OFFICE (JP)

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