Title:
THERMAL EVAPORATION SOURCES WITH SEPARATE CRUCIBLE FOR HOLDING THE EVAPORANT MATERIAL
Document Type and Number:
WIPO Patent Application WO/2011/140060
Kind Code:
A3
Abstract:
One aspect of the invention comprises a thermal evaporation source comprising an evaporant chamber, a heater for providing heat to the evaporation chamber; and a crucible in thermal communication with the evaporation chamber for containing a volume of evaporant. The evaporant chamber comprises a first material of construction, and the crucible comprises a second material of construction different from the first material of construction and having a lesser porosity with respect to the evaporant than the first material of construction. For example, for a copper evaporant, the evaporant chamber may comprise a sintered material, such as sintered graphite, and the crucible may comprise a pyrolytic material, such as pyrolytic graphite or pyrolytic boron nitride.
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Inventors:
ESER ERTEN (US)
Application Number:
PCT/US2011/034954
Publication Date:
March 01, 2012
Filing Date:
May 03, 2011
Export Citation:
Assignee:
UNIV DELAWARE (US)
ESER ERTEN (US)
ESER ERTEN (US)
International Classes:
C23C14/24; C23C14/26
Foreign References:
| JPH0770741A | 1995-03-14 | |||
| KR20040001384A | 2004-01-07 | |||
| JPH10124868A | 1998-05-15 | |||
| KR20030038268A | 2003-05-16 |
Other References:
See also references of EP 2566998A4
Attorney, Agent or Firm:
DONNELLY, Rex, A. et al. (P.O. Box 980Valley Forge, PA, US)
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