Title:
THERMAL FLOW METER
Document Type and Number:
WIPO Patent Application WO/2012/014956
Kind Code:
A1
Abstract:
Provided is a thermal flow sensor having high sensitivity and improved reliability. A sensor element (1) is provided with: a semiconductor substrate (2); a hollow part (4) which is formed in the semiconductor substrate (2); a heat-generating resistor (5) which is formed above the hollow part (4) with an electrical insulating film therebetween; a heating temperature sensor (7) which detects the heating temperature of the heat-generating resistor (5); and a drive circuit (22) which controls the heating temperature of the heat-generating resistor (5) by using the temperature detected by the heating temperature sensor (7). The heating temperature sensor (7) is a temperature sensitive resistor having a resistance value that changes depending on the temperature. The heating temperature sensor (7) is placed, with respect to the heat-generating resistor (5), upstream and downstream in the flow of a fluid to be measured and at the upper side and lower side in the direction perpendicular to the flow of the fluid to be measured.
Inventors:
NAKANO Hiroshi (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
中野洋 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
MATSUMOTO Masahiro (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
松本昌大 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
中野洋 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
MATSUMOTO Masahiro (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
松本昌大 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
Application Number:
JP2011/067198
Publication Date:
February 02, 2012
Filing Date:
July 28, 2011
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS, LTD. (2520, Takaba Hitachinaka-sh, Ibaraki 03, 〒3128503, JP)
日立オートモティブシステムズ株式会社 (〒03 茨城県ひたちなか市高場２５２０番地 Ibaraki, 〒3128503, JP)
NAKANO Hiroshi (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
中野洋 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
MATSUMOTO Masahiro (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
日立オートモティブシステムズ株式会社 (〒03 茨城県ひたちなか市高場２５２０番地 Ibaraki, 〒3128503, JP)
NAKANO Hiroshi (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
中野洋 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
MATSUMOTO Masahiro (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
International Classes:
G01F1/692
Attorney, Agent or Firm:
HIRAKI Yusuke (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
Download PDF:
Claims:
Previous Patent: NOVEL AZO COMPOUND, AQUEOUS SOLUTION, INK COMPOSITION, INK FOR INKJET RECORDING, INKJET RECORDING ME...
Next Patent: ABSORBENT ARTICLE
Next Patent: ABSORBENT ARTICLE