Title:
THERMAL FLOW RATE SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/006270
Kind Code:
A1
Abstract:
A thin film (101 to 105) constituting a membrane (10) and including, on either side of a heater (20), an upstream temperature sensor (30) and a downstream temperature sensor (40), is formed on a substrate (100) in which an opening (100a) including two opposite sides (11, 12) is formed. Further, heat conductive members (50) for promoting heat conduction from the heater to the substrate are provided covering said two sides of the opening portion, on both sides sandwiching the heater, the upstream temperature sensor, and the downstream temperature sensor. Furthermore, the heat conductive members are configured to cover the opening portion from an upper edge (100b) to a lower edge (100c), in the normal line direction of the membrane, where the upper edge is an edge portion of the opening portion on the membrane side thereof, and the lower edge is an edge portion on the side separated from the membrane.
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Inventors:
MASHITA HAJIME (JP)
KOUNO YASUSHI (JP)
YAMAGUCHI JYUNZOU (JP)
KOUNO YASUSHI (JP)
YAMAGUCHI JYUNZOU (JP)
Application Number:
PCT/JP2020/026553
Publication Date:
January 14, 2021
Filing Date:
July 07, 2020
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01F1/692
Foreign References:
| JP2000213973A | 2000-08-04 | |||
| JP2000292236A | 2000-10-20 | |||
| JP2007108031A | 2007-04-26 | |||
| JPH0943018A | 1997-02-14 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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